2/11/2013	3:41:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2013	3:41:56 PM	Recipe started at 3:41 PM
2/11/2013	3:41:56 PM	Helium valve closed
2/11/2013	3:41:56 PM	H2 valve closed
2/11/2013	3:41:56 PM	BCl3 valve closed
2/11/2013	3:41:56 PM	PH3 valve closed
2/11/2013	3:41:56 PM	SiCl4 pre valve closed
2/11/2013	3:41:56 PM	SiCl4 post valve closed
2/11/2013	3:41:57 PM	Main Vac valve closed
2/11/2013	3:41:57 PM	Bypass valve closed
2/11/2013	3:41:57 PM	Bubbler valve closed
2/11/2013	3:41:57 PM	Helium MFC set to  0.000000
2/11/2013	3:41:57 PM	H2 MFC set to  0.000000
2/11/2013	3:41:57 PM	BCl3 MFC set to  0.000000
2/11/2013	3:41:57 PM	PH3 MFC set to  0.000000
2/11/2013	3:41:57 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:41:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:41:57 PM	Tube furnace set to 0
2/11/2013	3:42:00 PM	H2 valve closed
2/11/2013	3:42:00 PM	BCl3 valve closed
2/11/2013	3:42:00 PM	PH3 valve closed
2/11/2013	3:42:00 PM	SiCl4 pre valve closed
2/11/2013	3:42:00 PM	SiCl4 post valve closed
2/11/2013	3:42:00 PM	Main Vac valve closed
2/11/2013	3:42:00 PM	Bypass valve closed
2/11/2013	3:42:00 PM	Bubbler valve closed
2/11/2013	3:42:00 PM	Helium valve opened
2/11/2013	3:42:00 PM	Helium MFC set to  500.000000
2/11/2013	3:42:00 PM	H2 MFC set to  0.000000
2/11/2013	3:42:00 PM	BCl3 MFC set to  0.000000
2/11/2013	3:42:00 PM	PH3 MFC set to  0.000000
2/11/2013	3:42:00 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:42:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:42:00 PM	Tube furnace set to 0
2/11/2013	3:43:12 PM	Helium valve closed
2/11/2013	3:43:12 PM	H2 valve closed
2/11/2013	3:43:12 PM	BCl3 valve closed
2/11/2013	3:43:12 PM	PH3 valve closed
2/11/2013	3:43:12 PM	SiCl4 pre valve closed
2/11/2013	3:43:13 PM	SiCl4 post valve closed
2/11/2013	3:43:13 PM	Main Vac valve closed
2/11/2013	3:43:13 PM	Bypass valve closed
2/11/2013	3:43:13 PM	Bubbler valve closed
2/11/2013	3:43:13 PM	Helium MFC set to  0.000000
2/11/2013	3:43:13 PM	H2 MFC set to  0.000000
2/11/2013	3:43:13 PM	BCl3 MFC set to  0.000000
2/11/2013	3:43:13 PM	PH3 MFC set to  0.000000
2/11/2013	3:43:13 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:43:13 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:43:13 PM	Tube furnace set to 0
2/11/2013	3:43:14 PM	Run finished at 3:43 PM
2/11/2013	3:43:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2013	3:51:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2013	3:51:39 PM	Recipe started at 3:51 PM
2/11/2013	3:51:39 PM	Helium valve closed
2/11/2013	3:51:39 PM	H2 valve closed
2/11/2013	3:51:39 PM	BCl3 valve closed
2/11/2013	3:51:39 PM	PH3 valve closed
2/11/2013	3:51:39 PM	SiCl4 pre valve closed
2/11/2013	3:51:39 PM	SiCl4 post valve closed
2/11/2013	3:51:39 PM	Main Vac valve closed
2/11/2013	3:51:39 PM	Bubbler valve closed
2/11/2013	3:51:39 PM	Bypass valve opened
2/11/2013	3:51:39 PM	Helium MFC set to  0.000000
2/11/2013	3:51:39 PM	H2 MFC set to  0.000000
2/11/2013	3:51:39 PM	BCl3 MFC set to  0.000000
2/11/2013	3:51:39 PM	PH3 MFC set to  0.000000
2/11/2013	3:51:39 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:51:39 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:51:39 PM	Tube furnace set to 0
2/11/2013	3:52:59 PM	Helium valve closed
2/11/2013	3:52:59 PM	H2 valve closed
2/11/2013	3:52:59 PM	BCl3 valve closed
2/11/2013	3:52:59 PM	PH3 valve closed
2/11/2013	3:52:59 PM	SiCl4 pre valve closed
2/11/2013	3:52:59 PM	SiCl4 post valve closed
2/11/2013	3:52:59 PM	Main Vac valve closed
2/11/2013	3:52:59 PM	Bubbler valve closed
2/11/2013	3:52:59 PM	Bypass valve opened
2/11/2013	3:52:59 PM	Helium MFC set to  0.000000
2/11/2013	3:52:59 PM	H2 MFC set to  0.000000
2/11/2013	3:52:59 PM	BCl3 MFC set to  0.000000
2/11/2013	3:52:59 PM	PH3 MFC set to  0.000000
2/11/2013	3:52:59 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:52:59 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:52:59 PM	Tube furnace set to 0
2/11/2013	3:53:59 PM	Helium valve closed
2/11/2013	3:53:59 PM	H2 valve closed
2/11/2013	3:53:59 PM	BCl3 valve closed
2/11/2013	3:53:59 PM	PH3 valve closed
2/11/2013	3:53:59 PM	SiCl4 pre valve closed
2/11/2013	3:53:59 PM	SiCl4 post valve closed
2/11/2013	3:53:59 PM	Bypass valve closed
2/11/2013	3:53:59 PM	Bubbler valve closed
2/11/2013	3:53:59 PM	Main Vac valve opened
2/11/2013	3:54:00 PM	Helium MFC set to  0.000000
2/11/2013	3:54:00 PM	H2 MFC set to  0.000000
2/11/2013	3:54:00 PM	BCl3 MFC set to  0.000000
2/11/2013	3:54:00 PM	PH3 MFC set to  0.000000
2/11/2013	3:54:00 PM	SiCl4 MFC set to  0.000000
2/11/2013	3:54:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	3:54:00 PM	Tube furnace set to 0
2/11/2013	3:54:01 PM	Run finished at 3:54 PM
2/11/2013	3:54:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2013	3:54:09 PM	Tube furnace set to 150
2/11/2013	3:54:26 PM	Tube furnace set to 200
2/11/2013	5:00:16 PM	Recipe started at 5:00 PM
2/11/2013	5:00:16 PM	Helium valve closed
2/11/2013	5:00:16 PM	H2 valve closed
2/11/2013	5:00:16 PM	BCl3 valve closed
2/11/2013	5:00:16 PM	PH3 valve closed
2/11/2013	5:00:16 PM	SiCl4 pre valve closed
2/11/2013	5:00:16 PM	SiCl4 post valve closed
2/11/2013	5:00:16 PM	Bypass valve closed
2/11/2013	5:00:16 PM	Bubbler valve closed
2/11/2013	5:00:16 PM	Main Vac valve opened
2/11/2013	5:00:16 PM	Helium MFC set to  0.000000
2/11/2013	5:00:16 PM	H2 MFC set to  0.000000
2/11/2013	5:00:16 PM	BCl3 MFC set to  0.000000
2/11/2013	5:00:16 PM	PH3 MFC set to  0.000000
2/11/2013	5:00:16 PM	SiCl4 MFC set to  0.000000
2/11/2013	5:00:16 PM	Bypass solenoid MFC set to  0.000000
2/11/2013	5:00:16 PM	Tube furnace set to 150
